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代表的な不良位置特定手法の比較

VC=Voltage Contrast, EBIC =Electron Beam Induced Current, RCI=Resistive Contrast Imaging, EBAC=Electron Beam Absorbed Current, L-SQUID=Laser Superconductive Quantum Interference Device, LTEM=Laser Terahertz Emission Microscope, PEM=Photo Emission, OBIC=Optical Beam Induced Current, OBIRCH=Optical Beam Induced Resistance Change, EBT=Electron Beam Testing, LVP=Laser Voltage Testing, TRE=Time Resolved Emission, SDL=Soft Defect Localization, LADA=Laser Assisted Device Alternation, SIL=Solid Immersion Lens